Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390827 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Daniel John William Brown, Igor V. Fomenkov | 2016-07-12 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Yezheng Tao, Daniel John William Brown, Alexander Anthony Schafgans, Michael David Caudill, Daniel J. Golich +1 more | 2016-06-28 |
| RE45957 | Regenerative ring resonator | Hong Ye, Rostislav Rokitski, Daniel J. W. Brown, Robert Jay Rafac | 2016-03-29 |
| 9232623 | Extreme ultraviolet light source | Robert Jay Rafac, Daniel John William Brown, Kai-Chung Hou | 2016-01-05 |