Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516730 | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source | Vladimir B. Fleurov, Igor V. Fomenkov, Alexander I. Ershov | 2016-12-06 |
| 9390827 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | Richard L. Sandstrom, Daniel John William Brown, Igor V. Fomenkov | 2016-07-12 |
| 9246298 | Corrosion resistant electrodes for laser chambers | Janine Kardokus, Thomas Patrick Duffey | 2016-01-26 |