Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516730 | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source | William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov | 2016-12-06 |
| 9271381 | Methods and apparatus for laser produced plasma EUV light source | — | 2016-02-23 |