Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516730 | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source | Vladimir B. Fleurov, William N. Partlo, Igor V. Fomenkov | 2016-12-06 |
| 9301382 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2016-03-29 |
| 9280053 | Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source | — | 2016-03-08 |