Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9462668 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown | 2016-10-04 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Yezheng Tao, Daniel John William Brown, Alexander Anthony Schafgans, Michael David Caudill, Richard L. Sandstrom +1 more | 2016-06-28 |