Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Zhepeng CONG, Balasubramanian Ramachandran, Masato Ishii, Xuebin Li, Mehmet Tugrul Samir +1 more | 2016-12-27 |
| 9322097 | EPI base ring | Steve Aboagye, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2016-04-26 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2016-01-05 |