Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519093 | Broadband and wide field angle compensator | Klaus Flock, Muzammil Arain, David Y. Wang | 2016-12-13 |
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more | 2016-12-06 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2016-07-26 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more | 2016-04-12 |