Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530623 | Process chamber apparatus, systems, and methods for controlling a gas flow pattern | Nir Merry, Chandrakant M. Sapkale, Izya Kremerman | 2016-12-27 |
| 9457464 | Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing | Izya Kremerman | 2016-10-04 |
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Nir Merry, Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Penchala N. Kankanala | 2016-08-30 |
| 9334127 | Systems, apparatus and methods for transporting substrates in electronic device manufacturing | Izya Kremerman | 2016-05-10 |
| 9325228 | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing | Izya Kremerman, Jeffrey A. Brodine, Damon K. Cox | 2016-04-26 |
| 9296105 | Vibration-controlled substrate handling robots, systems, and methods | Nir Merry, Alex Minkovich, Brendan Till | 2016-03-29 |
| 9281222 | Wafer handling systems and methods | William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman +4 more | 2016-03-08 |