Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516730 | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source | Vladimir B. Fleurov, William N. Partlo, Alexander I. Ershov | 2016-12-06 |
| 9462668 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Daniel John William Brown, Daniel J. Golich | 2016-10-04 |
| 9390827 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Richard L. Sandstrom, Daniel John William Brown | 2016-07-12 |