Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523800 | Computation efficiency by iterative spatial harmonics order truncation | John J. Hench | 2016-12-20 |
| 9400246 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Kevin Peterlinz, Gregory Brady +1 more | 2016-07-26 |
| 9255877 | Metrology system optimization for parameter tracking | Andrei V. Shchegrov, Gregory Brady, Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Alexander Kuznetsov | 2016-02-09 |