Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516729 | Variable radius mirror dichroic beam splitter module for extreme ultraviolet source | Kevin W. Zhang, Michael A. Purvis, Robert Jay Rafac | 2016-12-06 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Yezheng Tao, Daniel John William Brown, Michael David Caudill, Daniel J. Golich, Richard L. Sandstrom +1 more | 2016-06-28 |
| 9357625 | Extreme ultraviolet light source | Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown +2 more | 2016-05-31 |