Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021824 | Polymer compound, resist composition and method of forming resist pattern | Jun Iwashita, Sho Abe, Makiko Irie | 2011-09-20 |
| 8007981 | Resist composition and method of forming resist pattern | Ryoji Watanabe, Takehiro Seshimo | 2011-08-30 |
| 7939243 | Resin, resist composition and method of forming resist pattern | Masaru Takeshita, Jun Iwashita, Yuji Ohgomori | 2011-05-10 |
| 7927780 | Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator | Akiya Kawaue, Hideo Hada, Shinichi Hidesaka, Tsuyoshi Kurosawa, Natsuko Maruyama +4 more | 2011-04-19 |
| 7919227 | Positive resist composition and method of forming resist pattern | Yohei Kinoshita, Toshiyuki Ogata | 2011-04-05 |