Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039199 | Negative resist composition for immersion exposure and method of forming resist pattern | — | 2011-10-18 |
| 8034536 | Resist composition and method of forming resist pattern | Jun Iwashita, Shogo Matsumaru | 2011-10-11 |
| 8021824 | Polymer compound, resist composition and method of forming resist pattern | Jun Iwashita, Makiko Irie, Takeshi Iwai | 2011-09-20 |