Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034536 | Resist composition and method of forming resist pattern | Jun Iwashita, Sho Abe | 2011-10-11 |
| 7943284 | Compound, dissolution inhibitor, positive type resist composition, and method of forming resist pattern | Daiju Shiono, Taku Hirayama, Toshiyuki Ogata, Hideo Hada | 2011-05-17 |
| 7932013 | Pattern coating material and pattern forming method | Toshiyuki Ogata, Kiyoshi Ishikawa, Hideo Hada, Shigenori Fujikawa, Toyoki Kunitake | 2011-04-26 |