Issued Patents 2011
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025923 | Method for manufacturing a structure | Shigenori Fujikawa, Toyoki Kunitake, Hiromi Takaemoto, Mari Koizumi, Sanae Furuya | 2011-09-27 |
| 8017300 | Compound, positive resist composition and method for forming resist pattern | Daiju Shiono, Taku Hirayama | 2011-09-13 |
| 8012669 | Resist composition and method of forming resist pattern | Hiroaki Shimizu, Yasuhiro Yoshii, Yoshiyuki Utumi | 2011-09-06 |
| 7993706 | Method of forming a nano-structure and the nano-structure | Shigenori Fujikawa, Toyoki Kunitake, Toshiyuki Ogata | 2011-08-09 |
| 7960089 | Compound, method for producing same, positive resist composition and method for forming resist pattern | Daiju Shiono, Takahiro Dazai, Taku Hirayama, Kohei KASAI | 2011-06-14 |
| 7943284 | Compound, dissolution inhibitor, positive type resist composition, and method of forming resist pattern | Daiju Shiono, Taku Hirayama, Toshiyuki Ogata, Shogo Matsumaru | 2011-05-17 |
| 7932013 | Pattern coating material and pattern forming method | Shogo Matsumaru, Toshiyuki Ogata, Kiyoshi Ishikawa, Shigenori Fujikawa, Toyoki Kunitake | 2011-04-26 |
| 7927780 | Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator | Akiya Kawaue, Takeshi Iwai, Shinichi Hidesaka, Tsuyoshi Kurosawa, Natsuko Maruyama +4 more | 2011-04-19 |
| 7910284 | Materials for photoresist, photoresist composition and method of forming resist pattern | Kyoko Kojima, Daiju Shiono | 2011-03-22 |
| 7901865 | Resist composition and process for formation of resist patterns | Taku Hirayama, Daiju Shiono | 2011-03-08 |
| 7897319 | Positive resist composition and method of forming resist pattern | Daiju Shiono, Taku Hirayama | 2011-03-01 |
| 7879528 | Resist composition for electron beam or EUV | Takeo Watanabe, Hiroo Kinoshita | 2011-02-01 |
| 7862981 | Compound, positive resist composition and method of forming resist pattern | Daiju Shiono, Taku Hirayama | 2011-01-04 |