Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8025923 | Method for manufacturing a structure | Shigenori Fujikawa, Toyoki Kunitake, Hiromi Takaemoto, Mari Koizumi, Hideo Hada | 2011-09-27 |
| 7989138 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Takahiro Dazai, Takayoshi Mori, Ryoichi Takasu, Tomoyuki Hirano | 2011-08-02 |
| 7914967 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Takayoshi Mori, Takahiro Dazai, Ryoichi Takasu, Tomoyuki Hirano | 2011-03-29 |