Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989138 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Sanae Furuya, Takahiro Dazai, Ryoichi Takasu, Tomoyuki Hirano | 2011-08-02 |
| 7914967 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Sanae Furuya, Takahiro Dazai, Ryoichi Takasu, Tomoyuki Hirano | 2011-03-29 |