Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989138 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Sanae Furuya, Takahiro Dazai, Takayoshi Mori, Tomoyuki Hirano | 2011-08-02 |
| 7914967 | Fluorine-containing compound, resist composition for immersion exposure, and method of forming resist pattern | Sanae Furuya, Takayoshi Mori, Takahiro Dazai, Tomoyuki Hirano | 2011-03-29 |
| 7914968 | Positive resist composition and method of forming resist pattern | Takeyoshi Mimura, Akiya Kawaue | 2011-03-29 |