Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955777 | Compound, acid generator, resist composition and method of forming resist pattern | Takehiro Seshimo, Yoshiyuki Utsumi, Yoshitaka Komuro, Keita Ishiduka, Kyoko Ohshita | 2011-06-07 |
| 7927780 | Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator | Takeshi Iwai, Hideo Hada, Shinichi Hidesaka, Tsuyoshi Kurosawa, Natsuko Maruyama +4 more | 2011-04-19 |
| 7914968 | Positive resist composition and method of forming resist pattern | Takeyoshi Mimura, Ryoichi Takasu | 2011-03-29 |