Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955777 | Compound, acid generator, resist composition and method of forming resist pattern | Takehiro Seshimo, Yoshiyuki Utsumi, Yoshitaka Komuro, Akiya Kawaue, Kyoko Ohshita | 2011-06-07 |