Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007981 | Resist composition and method of forming resist pattern | Ryoji Watanabe, Takeshi Iwai | 2011-08-30 |
| 7955777 | Compound, acid generator, resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Yoshitaka Komuro, Keita Ishiduka, Akiya Kawaue, Kyoko Ohshita | 2011-06-07 |
| 7927780 | Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator | Akiya Kawaue, Takeshi Iwai, Hideo Hada, Shinichi Hidesaka, Tsuyoshi Kurosawa +4 more | 2011-04-19 |