Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960089 | Compound, method for producing same, positive resist composition and method for forming resist pattern | Daiju Shiono, Takahiro Dazai, Taku Hirayama, Hideo Hada | 2011-06-14 |