Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043795 | Method of forming resist pattern | — | 2011-10-25 |
| 8034536 | Resist composition and method of forming resist pattern | Shogo Matsumaru, Sho Abe | 2011-10-11 |
| 8021824 | Polymer compound, resist composition and method of forming resist pattern | Sho Abe, Makiko Irie, Takeshi Iwai | 2011-09-20 |
| 7939243 | Resin, resist composition and method of forming resist pattern | Masaru Takeshita, Takeshi Iwai, Yuji Ohgomori | 2011-05-10 |