Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029968 | Positive resist composition and method for resist pattern formation | Ryotaro Hayashi, Satoshi Yamada | 2011-10-04 |
| 8021824 | Polymer compound, resist composition and method of forming resist pattern | Jun Iwashita, Sho Abe, Takeshi Iwai | 2011-09-20 |