Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2011-11-08 |
| 7973281 | Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus | Hiroyuki Hayashi, Tomonobu Noda, Kenichi Kadota, Hisaki Kozaki | 2011-07-05 |