Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973281 | Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus | Hiroyuki Hayashi, Takamitsu Nagai, Tomonobu Noda, Kenichi Kadota | 2011-07-05 |