Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081814 | Linear pattern detection method and apparatus | Hiroshi Matsushita, Toshiyuki Aritake | 2011-12-20 |
| 7973281 | Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus | Hiroyuki Hayashi, Takamitsu Nagai, Tomonobu Noda, Hisaki Kozaki | 2011-07-05 |