Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081814 | Linear pattern detection method and apparatus | Kenichi Kadota, Toshiyuki Aritake | 2011-12-20 |
| 7982192 | Beam processing apparatus | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Takanori Yagita, Yoshitaka Amano, Yoshito Fujii | 2011-07-19 |
| 7979154 | Method and system for managing semiconductor manufacturing device | Junji Sugamoto, Masafumi Asano | 2011-07-12 |
| 7970486 | Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus | Junji Sugamoto, Masafumi Asano | 2011-06-28 |