Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8055366 | Simulation model creating method, mask data creating method and semiconductor device manufacturing method | Shoji Mimotogi | 2011-11-08 |
| 7982155 | System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices | — | 2011-07-19 |
| 7979154 | Method and system for managing semiconductor manufacturing device | Hiroshi Matsushita, Junji Sugamoto | 2011-07-12 |
| 7970486 | Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus | Hiroshi Matsushita, Junji Sugamoto | 2011-06-28 |
| 7930123 | Method, apparatus, and computer readable medium for evaluating a sampling inspection | Takahiro Ikeda | 2011-04-19 |
| 7883824 | Method for evaluating lithography apparatus and method for controlling lithography apparatus | Kenji Yoshida, Masahiro Kanno | 2011-02-08 |