Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7979154 | Method and system for managing semiconductor manufacturing device | Hiroshi Matsushita, Masafumi Asano | 2011-07-12 |
| 7970486 | Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus | Hiroshi Matsushita, Masafumi Asano | 2011-06-28 |