Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077292 | Projection exposure method | Yosuke Kitamura, Masaki Satake, Kazuya Fukuhara | 2011-12-13 |
| 8055366 | Simulation model creating method, mask data creating method and semiconductor device manufacturing method | Masafumi Asano | 2011-11-08 |
| 7912275 | Method of evaluating a photo mask and method of manufacturing a semiconductor device | Hiroki Yamamoto, Masamitsu Itoh, Osamu Ikenaga, Hideki Kanai, Yukiyasu Arisawa | 2011-03-22 |