Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085393 | Exposure apparatus inspection method and method for manufacturing semiconductor device | Kentaro Kasa, Takashi Sato | 2011-12-27 |
| 8077292 | Projection exposure method | Yosuke Kitamura, Masaki Satake, Shoji Mimotogi | 2011-12-13 |
| 8072601 | Pattern monitor mark and monitoring method suitable for micropattern | Kazutaka Ishigo | 2011-12-06 |
| 7960075 | Photomask unit, exposing method and method for manufacturing semiconductor device | Satoshi Nagai, Masamitsu Itoh, Kenji Kawano, Satoshi Tanaka | 2011-06-14 |
| 7925090 | Method of determining photo mask, method of manufacturing semiconductor device, and computer program product | Toshiya Kotani, Kyoko Izuha | 2011-04-12 |
| 7904851 | Photomask manufacturing method and semiconductor device manufacturing method | Masamitsu Itoh, Takashi Hirano | 2011-03-08 |