Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072601 | Pattern monitor mark and monitoring method suitable for micropattern | Kazuya Fukuhara | 2011-12-06 |
| 8034515 | Pattern forming method, pattern designing method, and mask set | — | 2011-10-11 |
| 7973419 | Semiconductor device and method of fabricating the same | Tomoyasu Kudo | 2011-07-05 |
| 7906258 | Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device | Nobuhiro Komine, Noriaki Sasaki, Masayuki Hatano | 2011-03-15 |