Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906258 | Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device | Kazutaka Ishigo, Noriaki Sasaki, Masayuki Hatano | 2011-03-15 |