Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071263 | Reflective mask and manufacturing method for reflective mask | Ryoichi Inanami, Yumi Nakajima | 2011-12-06 |
| 8025732 | Apparatus for processing a substrate | Hideaki Sakurai | 2011-09-27 |
| 7998759 | Maunfacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server | — | 2011-08-16 |
| 7960075 | Photomask unit, exposing method and method for manufacturing semiconductor device | Satoshi Nagai, Kazuya Fukuhara, Kenji Kawano, Satoshi Tanaka | 2011-06-14 |
| 7912275 | Method of evaluating a photo mask and method of manufacturing a semiconductor device | Hiroki Yamamoto, Osamu Ikenaga, Shoji Mimotogi, Hideki Kanai, Yukiyasu Arisawa | 2011-03-22 |
| 7906257 | Photomask manufacturing method and semiconductor device manufacturing method | — | 2011-03-15 |
| 7904851 | Photomask manufacturing method and semiconductor device manufacturing method | Takashi Hirano, Kazuya Fukuhara | 2011-03-08 |