Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071263 | Reflective mask and manufacturing method for reflective mask | Yumi Nakajima, Masamitsu Itoh | 2011-12-06 |
| 7972932 | Mark forming method and method for manufacturing semiconductor device | Takashi Sato, Hiroko Nakamura, Masaru Suzuki | 2011-07-05 |
| 7914958 | Semiconductor device manufacturing method | Shinji Mikami, Hirofumi Inoue | 2011-03-29 |