Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077292 | Projection exposure method | Yosuke Kitamura, Shoji Mimotogi, Kazuya Fukuhara | 2011-12-13 |
| 7901853 | Pattern prediction method, pattern correction method, semiconductor device, and recording medium | Satoshi Tanaka | 2011-03-08 |
| 7870532 | Lithography simulation method, method of manufacturing a semiconductor device and program | — | 2011-01-11 |