| 8047158 |
Substrate processing apparatus and reaction container |
Tadashi Kontani, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more |
2011-11-01 |
| 8039404 |
Production method for semiconductor device |
Hironobu Miya, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more |
2011-10-18 |
| 8028652 |
Batch-type remote plasma processing apparatus |
Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru |
2011-10-04 |
| 8020514 |
Batch-type remote plasma processing apparatus |
Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru |
2011-09-20 |
| 7958842 |
Substrate processing apparatus |
Shizue Ogawa, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru |
2011-06-14 |
| 7900580 |
Substrate processing apparatus and reaction container |
Tadashi Kontani, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more |
2011-03-08 |
| 7861668 |
Batch-type remote plasma processing apparatus |
Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru |
2011-01-04 |