Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058184 | Semiconductor device producing method | Hironobu Miya, Masayuki Asai | 2011-11-15 |
| 8039404 | Production method for semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2011-10-18 |
| 7892983 | Substrate processing apparatus and producing method of semiconductor device | Hironobu Miya, Taketoshi Sato, Masanori Sakai, Takaaki Noda | 2011-02-22 |