Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058184 | Semiconductor device producing method | Masayuki Asai, Norikazu Mizuno | 2011-11-15 |
| 8039404 | Production method for semiconductor device | Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2011-10-18 |
| 7981815 | Semiconductor device producing method and substrate processing apparatus | Kazuhiro Hirahara, Yoshitaka Hamada, Atsuhiko Suda | 2011-07-19 |
| 7892983 | Substrate processing apparatus and producing method of semiconductor device | Taketoshi Sato, Norikazu Mizuno, Masanori Sakai, Takaaki Noda | 2011-02-22 |