Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-11-01 |
| 8044624 | Load control apparatus and method for processing diagnosis signal for the same | Yosuke Matsuo, Shigeru Takeuchi | 2011-10-25 |
| 8039404 | Production method for semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Masanori Sakai, Masayuki Asai +2 more | 2011-10-18 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-03-08 |
| 7892983 | Substrate processing apparatus and producing method of semiconductor device | Hironobu Miya, Norikazu Mizuno, Masanori Sakai, Takaaki Noda | 2011-02-22 |