Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuo Ishimaru +5 more | 2011-11-01 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuo Ishimaru +5 more | 2011-03-08 |