Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2011-11-01 |
| 8028652 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2011-10-04 |
| 8020514 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2011-09-20 |
| 7958842 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani | 2011-06-14 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2011-03-08 |
| 7861668 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani | 2011-01-04 |