Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8028652 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2011-10-04 |
| 8020514 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2011-09-20 |
| 7958842 | Substrate processing apparatus | Shizue Ogawa, Kazuyuki Toyoda, Tadashi Kontani, Nobuo Ishimaru | 2011-06-14 |
| 7861668 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Yasuhiro Inokuchi, Tadashi Kontani, Nobuo Ishimaru | 2011-01-04 |