Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071477 | Method of manufacturing semiconductor device and substrate processing apparatus | Atsushi Moriya, Tetsuya Marubayashi | 2011-12-06 |
| 8070880 | Substrate processing apparatus | Tetsuya Marubayashi | 2011-12-06 |
| 8028652 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-10-04 |
| 8025739 | Method of manufacturing semiconductor device | Kiyohisa ISHIBASHI, Atsushi Moriya, Yoshiaki Hashiba | 2011-09-27 |
| 8020514 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-09-20 |
| 8012885 | Manufacturing method of semiconductor device | Atsushi Moriya, Yasuhiro Ogawa | 2011-09-06 |
| 7861668 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-01-04 |