Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071477 | Method of manufacturing semiconductor device and substrate processing apparatus | Tetsuya Marubayashi, Yasuhiro Inokuchi | 2011-12-06 |
| 8025739 | Method of manufacturing semiconductor device | Kiyohisa ISHIBASHI, Yasuhiro Inokuchi, Yoshiaki Hashiba | 2011-09-27 |
| 8012885 | Manufacturing method of semiconductor device | Yasuhiro Inokuchi, Yasuhiro Ogawa | 2011-09-06 |