Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070880 | Substrate processing apparatus | Yasuhiro Inokuchi | 2011-12-06 |
| 8071477 | Method of manufacturing semiconductor device and substrate processing apparatus | Atsushi Moriya, Yasuhiro Inokuchi | 2011-12-06 |