Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981815 | Semiconductor device producing method and substrate processing apparatus | Hironobu Miya, Kazuhiro Hirahara, Atsuhiko Suda | 2011-07-19 |
| 7923522 | Process for preparing a dispersion liquid of zeolite fine particles | Masaru Sasago, Hideo Nakagawa, Yasunori Morinaga | 2011-04-12 |