Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003962 | Extreme ultraviolet light source apparatus and nozzle protection device | Hiroshi Someya, Hideo Hoshino | 2011-08-23 |
| 7999241 | Extreme ultraviolet light source apparatus | Shinji Nagai, Takanobu Ishihara, Kouji Kakizaki | 2011-08-16 |
| 8000361 | Laser system | Hideo Hoshino, Akira Endo, Osamu Wakabayashi, Kouji Kakizaki | 2011-08-16 |
| 7923705 | Extreme ultra violet light source apparatus | Masato Moriya, Takashi Suganuma, Hiroshi Someya, Takayuki Yabu, Akira Sumitani +1 more | 2011-04-12 |
| 7880153 | Extreme ultra violet light source apparatus | Takashi Suganuma, Hiroshi Someya, Akira Sumitani | 2011-02-01 |