Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003962 | Extreme ultraviolet light source apparatus and nozzle protection device | Tamotsu Abe, Hideo Hoshino | 2011-08-23 |
| 7923705 | Extreme ultra violet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Takayuki Yabu, Akira Sumitani +1 more | 2011-04-12 |
| 7880153 | Extreme ultra violet light source apparatus | Takashi Suganuma, Tamotsu Abe, Akira Sumitani | 2011-02-01 |